S. List

Depth-profiling of vertical sidewall nanolayers on structured wafers by grazing incidence X-ray flourescence

Philipp Hönicke, Burkhard Beckhoff, Michael Kolbe, 2008 .

Scanning electron microscope measurement of width and shape of 10nm patterned lines using a JMONSEL-modeled library.

R. J. Kline, J. Villarrubia, A. Vladár, 2015, Ultramicroscopy.