Seong-Soon Baek

Wafer level vacuum packaged de-coupled vertical gyroscope by a new fabrication process

Yong-Soo Oh, S. O. Choi, B. J. Ha, 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308).

A area variable capacitive microaccelerometer with force-balancing electrodes

Yong-Soo Oh, Kyu-Yeon Park, Byeoung-ju Ha, 1998, IEEE 1998 Position Location and Navigation Symposium (Cat. No.98CH36153).