Mikiho Kiuchi

An electron cyclotron resonance plasma deposition technique employing magnetron mode sputtering

Seitaro Matsuo, Chiharu Takahashi, T. Ono, 1988 .

Low Temperature Chemical Vapor Deposition Method Utilizing an Electron Cyclotron Resonance Plasma

Seitaro Matsuo, S. Matsuo, Mikiho Kiuchi, 1983 .