C. Bergaud

Formation of implanted piezoresistors under 100-nm thick for nanoelectromechanical systems

R. Plana, L. Bary, B. Belier, 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).

A Closed-loop MEMS-based Spotter Integrating Position Sensors with Nanometric Precision for the Control of Droplet Uniformity

Liviu Nicu, F. Mathieu, D. Saya, 2006, 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems.

Liquid loading of silicon-based cantilevers using electrowetting actuation for microspotting applications

L. Nicu, F. Mathieu, D. Saya, 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..