S Y Oh

Motion-free all optical inspection system for nanoscale topology control.

Sergey Koptyaev, Maxim Ryabko, Alexey Lantsov, 2014, Optics express.

Method for optical inspection of nanoscale objects based upon analysis of their defocused images and features of its practical implementation.

S Y Oh, M V Ryabko, S N Koptyaev, 2013, Optics express.