R Ziermann

A high temperature pressure sensor prepared by selective deposition of cubic silicon carbide on SOI substrates

H. Möller, M. Eickhoff, Gerhard Kroetz, 1999 .

High temperature piezoresistive β-SiC-on-SOI pressure sensor with on chip SiC thermistor

Ernst Obermeier, G. Krötz, H. Möller, 1999 .