Y. Oppliger

One-step 3D shaping using a gray-tone mask for optical and microelectronic applications

Guy Voirin, Pierre Sixt, P. Sixt, 1994 .

Electron beam writing of continuous resist profiles for optical applications

L. Baraldi, M. T. Gale, Y. Oppliger, 1992 .

Mix and match lithography for 0.1 mm MOSFET fabrication

M. Dutoit, J. Moret, M. Dutoit, 1991 .

Nanometer thin-film Ni-NiO-Ni diodes for 30 THz radiation

Ingrid Wilke, F. Kneubühl, I. Wilke, 1994 .