Hidetsugu Uchida

A Site Specification Method of Gate Oxide Breakdown Spots by a New Test Structure of MOS Capacitors

Satoshi Ikeda, Hidetsugu Uchida, Norio Hirashita, 2001 .

Improvement of measurement accuracy for the three-dimensional electromagnetic articulograph by optimizing the alignment of the transmitter coils

Hidetsugu Uchida, Tokihiko Kaburagi, Kohei Wakamiya, 2016 .

An accurate discrimination method of gate oxide breakdown positions by a new test structure of MOS capacitors

Hidetsugu Uchida, Satoshi Ikeda, Norio Hirashita, 2001, ICMTS 2001. Proceedings of the 2001 International Conference on Microelectronic Test Structures (Cat. No.01CH37153).

Enhancement of hot-carrier induced degradation under low gate voltage stress due to hydrogen for NMOSFETs with SiN films

T. Nakamura, Hidetsugu Uchida, N. Murakami, 1997, 1997 IEEE International Reliability Physics Symposium Proceedings. 35th Annual.

The effect of surface roughness of Si/sub 3/N/sub 4/ films on TDDB characteristics of ONO films

Hiroyuki Tanaka, N. Hirashita, Hidetsugu Uchida, 1992, 30th Annual Proceedings Reliability Physics 1992.

Cross-sectional Transmission Electron Microscope Studies on Intrinsic Breakdown Spots of Thin Gate Oxides

Hidetsugu Uchida, Satoshi Ikeda, Norio Hirashita, 1997 .

Accurate secondary ion mass spectrometry analysis of shallow doping profiles in Si based on the internal standard method

Hidetsugu Uchida, S. Kuroda, Norio Hirashita, 1996 .

The degradation of TDDB characteristics of Si0/sub 2//Si/sub 3/N/sub 4//Si0/sub 2/ stacked films caused by surface roughness of Si/sub 3/N/sub 4/ films (DRAMs)

N. Hirashita, Hidetsugu Uchida, T. Ajioka, 1993 .

The effect of oxide charges at LOCOS isolation edges on oxide breakdown

N. Hirashita, Hidetsugu Uchida, T. Ajioka, 1993 .

Electron trap center generation due to hole trapping in SiO2 under Fowler–Nordheim tunneling stress

Tsuneo Ajioka, Hidetsugu Uchida, 1987 .

Thermal Desorption and Infrared Studies of Plasma-Enhanced Chemical Vapor Deposited SiO Films with Tetraethylorthosilicate

Hidetsugu Uchida, Norio Hirashita, N. Hirashita, 1993 .

Enhanced degradation of oxide breakdown in the peripheral region by metallic contamination

Tsuneo Ajioka, Hidetsugu Uchida, Norio Hirashita, 1990, International Technical Digest on Electron Devices.