Y. Taga
发表
Specimen size effect on tensile strength of surface micromachined polycrystalline silicon thin films
T. Tsuchiya,
T. Tsuchiya,
Y. Taga,
1997,
Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.
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Y. Taga,
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1984
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Yutaka Nonomura,
Masaharu Takeuchi,
Yuji Nishibe,
1996
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Yutaka Nonomura,
Masaharu Takeuchi,
Yuji Nishibe,
1997
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Shizuo Tokito,
Hiromitsu Tanaka,
S. Tokito,
1997
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