Patrick A. Taylor

Studying post-etching silicon crystal defects on 300mm wafer by automatic defect review AFM

Ardavan Zandiatashbar, Patrick A. Taylor, Byong Kim, 2016, SPIE Advanced Lithography.

A laboratory information management system for small to medium sized soil, plant and water testing laboratories

Patrick A. Taylor, Rodney Luciuk, Gary E. Winkleman, 2000 .

TIS, AFM, interferometry, and optical profiler correlation of surface roughness on silicon wafers

Patrick A. Taylor, Dean J. Dawson, 1999, Photonics West.