Yun-Liang Huang

Kinematic Analysis and Measurement of Temperature Rise on a Pad in Chemical Mechanical Planarization

Hong Hocheng, Yun-Liang Huang, Lai‐Juh Chen, 1999 .

In situ endpoint detection by pad temperature in chemical-mechanical polishing of copper overlay

Hong Hocheng, H. Hocheng, Yun-Liang Huang, 2004 .