Yukihiko Maejima

Sub-0.1 µm Resist Patterning in Soft X-Ray (13 nm) Projection Lithography

Takao Taguchi, Hiroaki Oizumi, Katsuhiko Murakami, 1993 .

Fabrication of 0.1 µm Line-and-Space Patterns using Soft X-Ray Reduction Lithography

Takao Taguchi, Hiroaki Oizumi, Katsuhiko Murakami, 1994 .