T. Uchiyama
发表
Varun Vohra,
Y. Okada-Shudo,
T. Uchiyama,
2020
.
H. Fujiwara,
Y. Zheng,
A. Watanabe,
2008
.
H. Kan,
H. Miyajima,
T. Hiruma,
2003
.
Varun Vohra,
Y. Takeoka,
K. Koizumi,
2020
.
G. Wallace,
D. Officer,
A. Mozer,
2013,
ACS applied materials & interfaces.
T. Murakami,
S. Mori,
N. Masaki,
2013
.
T. Murakami,
S. Mori,
N. Masaki,
2013
.
Varun Vohra,
Y. Okada-Shudo,
T. Uchiyama,
2019,
ACS Sustainable Chemistry & Engineering.
I. Uchida,
M. Nishizawa,
T. Itoh,
2000
.
Varun Vohra,
H. Schwoerer,
W. Porzio,
2020
.
S. Nagahara,
N. Onoda,
T. Uchiyama,
2009,
2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference.
Y. Matsui,
N. Onoda,
S. Nagahara,
2009,
IEEE Transactions on Semiconductor Manufacturing.
Susumu Iida,
Takayuki Uchiyama,
T. Uchiyama,
2019,
Micro and Nano Engineering.
T. Saiki,
T. Uchiyama,
Yuya Kihara,
2015
.
T. Saiki,
T. Uchiyama,
Kenta Kuwamura,
2013
.
I. Uchida,
M. Nishizawa,
T. Abe,
1999
.
T. Matsue,
I. Uchida,
M. Nishizawa,
1998
.
Toshiharu Saiki,
T. Saiki,
T. Uchiyama,
2015
.
Susumu Iida,
Takayuki Uchiyama,
Takamitsu Nagai,
2019,
Journal of Micro/Nanolithography, MEMS, and MOEMS.