C.C. Wang

Pull-in suppression and torque magnification in parallel plate electrostatic actuators with side electrodes

H. Sane, C.H. Mastrangelo, M. Waelti, 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

Electrostatic micromirror arrays fabricated with bulk and surface micromachining techniques

C.H. Mastrangelo, A. Pareek, M. Waelti, 2003, The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE.