M.A. Gosalvez

Octree-search kinetic monte carlo algorithm for the simulation of complex 3D MEMS structures

K. Sato, K. Sato, Y. Xing, 2008, 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems.

Analytical Solution of the Continuous Cellular Automaton for Anisotropic Etching

K. Sato, Yan Xing, K. Sato, 2008, Journal of Microelectromechanical Systems.