Myo Taeg Lim

Prediction of Etch Profile Uniformity Using Wavelet and Neural Network

Byungwhan Kim, Won Sun Choi, Myo Taeg Lim, 2004 .

Wavelet-based uniformity of plasma etching surface

Bhum Joon Kim, Myo Taeg Lim, Sungmo Kim, 2003 .