Lin Cheng

Effect of trimethylsilane flow rate on the growth of SiC thin-films for fiber-optic temperature sensors

A. J. Steckl, James D. Scofield, A. Steckl, 2003 .

Growth and doping of SiC-thin films on low-stress, amorphous Si3N4/Si substrates for robust microelectromechanical systems applications

A. Steckl, J. Scofield, Lin Cheng, 2002 .