C.E. Murabito

Test structures for referencing electrical linewidth measurements to silicon lattice parameters using HRTEM

L. W. Linholm, C. E. Murabito, W. Guthrie, 2002, Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002..

Extraction of critical dimension reference feature CDs from new test structure using HRTEM imaging

A. Hunt, B. Park, R.A. Allen, 2005, Proceedings of the 2005 International Conference on Microelectronic Test Structures, 2005. ICMTS 2005..