W. Katzschner

Reactive ion beam etching of InP with N2 and N2/O2 mixtures

U. Niggebrügge, W. Katzschner, R. Löffler, 1986 .

Ion beam milling of InP with an Ar/O2‐gas mixture

A. Steckenborn, Norbert Grote, A. Steckenborn, 1984 .