Masatake Katayama

Nonlinear increase in silicon epitaxial growth rate in a SiHCl3H2 system under atmospheric pressure

Hitoshi Habuka, Kikuo Okuyama, Manabu Shimada, 1997 .

Model on transport phenomena and epitaxial growth of silicon thin film in SiHCl3H2 system under atmospheric pressure

Hitoshi Habuka, Kikuo Okuyama, Manabu Shimada, 1996 .