Atsushi Hidaka

Adsorption Behavior of Various Fluorocarbon Gases on Silicon Wafer Surface

Tadahiro Ohmi, Takeyoshi Kato, Yasuyuki Shirai, 2005 .

The Degradation Prevention of Resin Materials for Semiconductor Manufacturing Equipment by Applying the Ultra-High Purity Gas Supply Technology

Tadahiro Ohmi, Hidekazu Ishii, Yasuyuki Shirai, 2005 .