P.J. French
发表
J. Groeneweg,
W. Olthuis,
P. Sarro,
2004,
Proceedings of IEEE Sensors, 2004..
Robust Wafer-Level Thin-Film Encapsulation of Microstructures using Low Stress PECVD Silicon Carbide
V. Rajaraman,
P.M. Sarro,
H.T.M. Pham,
2009,
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.
P.J. French,
L.S. Pakula,
H. Yang,
2008,
2008 International Conference on Advanced Semiconductor Devices and Microsystems.
P.T.J. Gennissen,
H. Ohji,
K. Tsutsumi,
1999,
Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).
A. Purniawan,
G. Pandraud,
Y. Huang,
2011,
2011 IEEE SENSORS Proceedings.
J.F. Creemer,
P.J. French,
2000,
30th European Solid-State Device Research Conference.
J. Groeneweg,
P.M. Sarro,
P.J. French,
1997,
Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
J. Groeneweg,
W. Olthuis,
P. Sarro,
2005,
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..