S. Iida

A 100-nG/√ Hz-Level Single Au Proof-Mass 3-Axis MEMS Accelerometer with Pillar-Shaped electrodes

K. Machida, N. Ishihara, K. Masu, 2020, 2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP).

Influence of fibrous contaminants on dielectric property of XLPE insulation

K. Kaminaga, S. Fukunaga, K. Yatsuka, 1992, Conference Record of the 1992 IEEE International Symposium on Electrical Insulation.

Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electrodeposition and the Temperature Dependency

U. Schmid, K. Machida, K. Masu, 2021 .

Frictional properties of structural steel JN2 at cryogenic temperatures in a vacuum

M. Sugimoto, H. Nakajima, Kiyoshi Yoshida, 1993 .

Frictional heating and temperature rise of magnet structural materials at 4 K

H. Takahashi, H. Arai, S. Iida, 1993 .

Alloy Electroplating and Young’s Modulus Characterization of AuCu Alloy Microcantilevers

K. Machida, K. Masu, D. Yamane, 2020 .

Cu-alloying effect on structure stability of electrodeposited gold-based micro-cantilever evaluated by long-term vibration test

K. Machida, K. Masu, D. Yamane, 2019, Microelectronic Engineering.