S. Wittekoek

发表

Step And Repeat Wafer Imaging

S. Wittekoek, S. Wittekoek, 1980, Other Conferences.

Precision Wafer-Stepper Alignment And Metrology Using Diffraction Gratings And Laser Interferometry

S. Wittekoek, H. Linders, H. Stover, 1986, Optics & Photonics.

Advance in Deep UV Stepper Technology : Photolithography

S. Wittekoek, James S. Greeneich, Martin A. van den Brink, 1992 .

Optical aspects of the silicon repeater

S. Wittekoek, 1983 .