K. Köhler

Plasma potentials of 13.56-MHz rf argon glow discharges in a planar system

J. Coburn, D. Horne, E. Kay, 1985 .

Frequency dependence of ion bombardment of grounded surfaces in rf argon glow discharges in a planar system

J. Coburn, D. Horne, J. W. Coburn, 1985 .

Summary Abstract: Plasma potentials of 13.56 MHz rf argon glow discharges in a planar system

J. Coburn, D. Horne, E. Kay, 1985 .

A Compact, Pulsed Nozzle Beam Source for Crossed Molecular Beam Experiments with Arbitrary Beam Intersection Angles

K. Köhler, 1973 .