I. Barzen

Determination of energy and mass distributions of ions and neutral particles in magnetron-ionplating

S. Ulrich, H. Ehrhardt, G. Keller, 1991 .

Ion bombardment-induced nanocrystallization of magnetron-sputtered chromium carbide thin films

C. Ziebert, S. Ulrich, J. Ye, 2011 .

Preparation of cubic boron nitride films by radio frequency magnetron sputtering and radio frequency ion plating

S. Ulrich, J. Schwan, H. Ehrhardt, 1996 .

Radio frequency ion plating-induced phase transition from h-BN to nanocrystalline c-BN

S. Ulrich, J. Schwan, H. Ehrhardt, 1995 .

Correlation of particle flux parameters with the properties of thin tungsten carbide films

S. Ulrich, H. Ehrhardt, G. Keller, 1991 .