R. Erz

Determination of energy and mass distributions of ions and neutral particles in magnetron-ionplating

S. Ulrich, H. Ehrhardt, G. Keller, 1991 .

Preparation of smooth and nanocrystalline diamond films

H. Ehrhardt, K. Jung, H. Ehrhardt, 1993 .

Investigation of boron and hydrogen concentrations in p-type diamond films by infrared spectroscopy

H. Ehrhardt, W. Dötter, R. Erz, 1995 .

Correlation of particle flux parameters with the properties of thin tungsten carbide films

S. Ulrich, H. Ehrhardt, G. Keller, 1991 .

Production scale deposition of multilayer film structures for birefringent optical components

David M. Shemo, K. L. Tan, M. Tilsch, 2007 .