Y. Catherine

发表

Preparation Techniques for Diamond-Like Carbon

Y. Catherine, 1991 .

Optical emission spectroscopy for diagnostic and monitoring of CH4 plasmas used for a-C : H deposition

Y. Catherine, A. Pastol, 1990 .

Diagnostics of CH/sub 4/ plasmas used for diamond-like carbon deposition

Y. Catherine, A. Pastol, L. Athouel, 1990 .

Electrical characteristics and growth kinetics in discharges used for plasma deposition of amorphous carbon

Y. Catherine, P. Couderc, 1986 .

Computer simulation of a carbon-deposition plasma in CH/sub 4/

A. Rhallabi, Y. Catherine, 1991 .

Glow discharge deposition of silicon dioxide and aluminum oxide films: A kinetic model of the surface processes

Y. Catherine, C. Bourreau, P. García, 1990 .

Growth kinetics and step coverage in plasma deposition of silicon dioxide from organosilicon compounds

Y. Catherine, C. Bourreau, P. García, 1991 .

Quadrupole mass spectrometric study of positive ions from RF plasmas of pure CH4, CH4/H2, and CH4/Ar systems

Wei Zhang, Y. Catherine, 1991 .

A study of the silane glow discharge deposition by isotopic labelling

G. Turban, Y. Catherine, B. Grolleau, 1981 .

Deposition of carbon films by the dissociation of methane in r.f. discharge

Wei Zhang, Y. Catherine, 1991 .

Ion and radical reactions in the silane glow discharge deposition of a-Si:H films

G. Turban, Y. Catherine, B. Grolleau, 1982 .

Ion bombardment effects in plasma deposition of hydrogenated amorphous silicon carbide films: A comparative study of d.c. and r.f. discharges

M. Gauthier, A. Zamouche, Y. Catherine, 1983 .

Disorder and density of defects in hydrogenated amorphous silicon-carbon

M. Schmidt, Y. Catherine, M. Gauthier, 1985 .

Electronic and optical properties of glow-discharge amorphous silicon-carbon alloys

M. Schmidt, A. Zamouche, Y. Catherine, 1984 .

Reactive plasma deposited SixCyHz films

G. Turban, Y. Catherine, 1979 .

Reaction mechanisms in plasma deposition of SixC1-x:H films

G. Turban, Y. Catherine, B. Grolleau, 1981 .

Glow discharge deposition of tetramethylsilane films

A. Zamouche, Y. Catherine, 1985 .

Mass spectrometry of a silane glow discharge during plasma deposition of a-Si: H films

G. Turban, Y. Catherine, B. Grolleau, 1980 .

Reaction mechanisms of the radio frequency glow discharged deposition process in silane-helium

G. Turban, Y. Catherine, B. Grolleau, 1979 .

Photo-induced changes in the coefficient of the temperature dependence of the Fermi level in discharge-produced amorphous silicon

M. Gauthier, M. Galin, Y. Catherine, 1982 .

Neutral and ion chemistry in a C2H4-SiH4 discharge

G. Turban, Y. Catherine, B. Grolleau, 1982 .

Infrared absorption of hydrogenated amorphous SiC and GeC films

G. Turban, Guy Turban, Y. Catherine, 1980 .

Plasma deposition of aluminum oxide films

Y. Catherine, A. Talebian, 1988 .

Deposition of Amorphous Hydrogenated Carbon Films in Low and High Frequency Discharges

Y. Catherine, 1991 .

A kinetic model for radio frequency plasma-activated chemical vapour deposition

G. Turban, Y. Catherine, 1978 .

Structure and physical properties of plasma-grown amorphous hydrogenated carbon films

Y. Catherine, Y. Catherine, P. Couderc, 1987 .