Y. Fukunaga

Narrow free-standing features fabricated by top-down self-limited trimming of organic materials using precisely temperature-controlled plasma etching system

M. Hori, M. Sekine, H. Kondo, 2019, Japanese Journal of Applied Physics.

Surface-enhanced Raman scattering of DNA bases using frozen silver nanoparticle dispersion as a platform

M. Harada, T. Okada, Y. Fukunaga, 2021, Microchimica Acta.

Freeze Control of Nanoparticle Aggregation and Exploration as Surface Enhanced Raman Scattering (SERS) Platform

M. Harada, T. Okada, Y. Fukunaga, 2021 .

Temperature dependence of protection layer formation on organic trench sidewall in H2/N2 plasma etching with control of substrate temperature

M. Hori, M. Sekine, K. Takeda, 2017 .

Interaction of oxygen with polystyrene and polyethylene polymer films: A mechanistic study

M. Hori, M. Sekine, G. Hwang, 2020 .

Highly Efficient Blue–Ultraviolet Photodetectors Based on II–VI Wide‐Bandgap Compound Semiconductors

H. Kasada, K. Ando, Y. Fukunaga, 2002 .

Feedback Control System of Wafer Temperature for Advanced Plasma Processing and its Application to Organic Film Etching

Masafumi Ito, Masaru Hori, Makoto Sekine, 2015, IEEE Transactions on Semiconductor Manufacturing.

Variable range hopping conduction and percolation networks in the pellets formed from pristine and boron-doped carbon nanohorn particles

Y. Fukunaga, M. Harada, S. Bandow, 2009 .

Electron behaviors in afterglow of synchronized dc-imposed pulsed fluorocarbon-based plasmas

M. Hori, M. Sekine, K. Takeda, 2017 .