Y. Ohya

Spatial profiles of interelectrode electron density in direct current superposed dual-frequency capacitively coupled plasmas

M. Hori, M. Sekine, K. Takeda, 2017 .

Photodetachment Study of Capacitively-Coupled RF C4F8Plasma

A. Kono, Y. Ohya, 2000 .

Electron behaviors in afterglow of synchronized dc-imposed pulsed fluorocarbon-based plasmas

M. Hori, M. Sekine, K. Takeda, 2017 .

Rapid electron density decay observed by surface-wave probe in afterglow of pulsed fluorocarbon-based plasma

M. Hori, M. Sekine, K. Ishikawa, 2016 .

Future of plasma etching for microelectronics: Challenges and opportunities

R. Gottscho, M. Sekine, M. Kushner, 2024, Journal of Vacuum Science & Technology B.