C. Küllig

发表

Spatially resolved Langmuir probe diagnostics in a capacitively coupled radio frequency argon and oxygen plasma

J. Meichsner, C. Küllig, T. Wegner, 2015 .

On the E-H transition in inductively coupled radio frequency oxygen plasmas: II. Electronegativity and the impact on particle kinetics

J. Meichsner, C. Küllig, T. Wegner, 2017 .

Instabilities in a capacitively coupled oxygen plasma

J. Meichsner, C. Küllig, T. Wegner, 2015 .

E‐H Transition in Argon/Oxygen Inductively Coupled RF Plasmas

J. Meichsner, C. Küllig, T. Wegner, 2015 .

Dynamics and Electronegativity of Oxygen RF Plasmas

J. Meichsner, K. Matyash, D. Loffhagen, 2012 .

A novel approach for negative ion analysis using 160 GHz microwave interferometry and laser photodetachment in oxygen cc-rf plasmas

J. Meichsner, C. Küllig, K. Dittmann, 2010 .

On the E-H transition in inductively coupled radio frequency oxygen plasmas: I. Density and temperature of electrons, ground state and singlet metastable molecular oxygen

J. Meichsner, C. Küllig, T. Wegner, 2017 .

Particle-In-Cell simulation of laser photodetachment in capacitively coupled radio frequency oxygen discharges

R. Schneider, J. Meichsner, K. Matyash, 2013 .

Electron and negative ion dynamics in electronegative cc-rf plasmas

J. Meichsner, C. Küllig, K. Dittmann, 2012 .

Electron and Negative Ion Analysis in Oxygen Capacitively Coupled Radio Frequency Plasma

J. Meichsner, C. Küllig, K. Dittmann, 2012 .

Electron heating during E-H transition in inductively coupled RF plasmas

J. Meichsner, C. Küllig, T. Wegner, 2015 .

160 GHz Gaussian beam microwave interferometry in low-density rf plasmas

J. Meichsner, C. Küllig, K. Dittmann, 2012 .

Mode transition and hysteresis in inductively coupled radio frequency argon discharge

J. Meichsner, C. Küllig, T. Wegner, 2016 .

Excitation Patterns and Heating Mechanisms During E-H-Mode Transition in Inductively Coupled RF Oxygen Discharges

J. Meichsner, C. Küllig, T. Wegner, 2014, IEEE Transactions on Plasma Science.

Detachment-induced electron production in the early afterglow of pulsed cc-rf oxygen plasmas

J. Meichsner, C. Küllig, K. Dittmann, 2012 .