J. Ballutaud

Nonuniform radio-frequency plasma potential due to edge asymmetry in large-area radio-frequency reactors

J. Schmitt, A. Howling, L. Sansonnens, 2004 .

High-efficiency p-i-n a-Si:H solar cells with low boron cross-contamination prepared in a large-area single-chamber PECVD reactor

J. Meier, Arvind Shah, A. Howling, 2004 .

Reduction of the boron cross-contamination for plasma deposition of p?i?n devices in a single-chamber large area radio-frequency reactor

Arvind Shah, A. Howling, S. Benagli, 2004 .