E. Ducke

EPR investigation of plasma-chemical resist etching in O2 and O2/CF4 discharges

F. Breitbarth, E. Ducke, H. Tiller, 1990 .

Epitaxial growth of SiC thin films on Si-stabilized α-SiC(0001) at low temperatures by solid-source molecular beam epitaxy

B. Schröter, W. Richter, U. Kaiser, 1995 .

Emissionspectroscopic Investigation of Bci3 Discharges

F. Breitbarth, E. Ducke, 1990 .