S. Shima
发表
K. Suguro,
Y. Nakasaki,
M. Kashiwagi,
1988
.
A. Fukunaga,
T. Fukuma,
T. Kitagawa,
2016,
ACS nano.
E. Kondoh,
Mitsuhiro Watanabe,
S. Shima,
2017
.
E. Kondoh,
Lianhua Jin,
Mitsuhiro Watanabe,
2016
.
A. Fukunaga,
A. Yano,
K. Amagai,
2020
.
A. Fukunaga,
S. Shima,
M. Tsujimura,
2010
.
Jin-Goo Park,
Byoung-Jun Cho,
S. Shima,
2016
.
A. Fukunaga,
T. Fukuma,
T. Kitagawa,
2016
.
Jin-Goo Park,
Byoung-Jun Cho,
S. Shima,
2016
.
Jin-Goo Park,
Byoung-Jun Cho,
S. Shima,
2014,
Proceedings of International Conference on Planarization/CMP Technology 2014.
K. Suguro,
Y. Nakasaki,
Tomoyasu Inoue,
1988
.
H. Tango,
Yasushi Nakasaki,
K. Suguro,
1987
.
J. Matsunaga,
T. Nakayama,
S. Shima,
1987,
IEEE Transactions on Electron Devices.
E. Kondoh,
Lianhua Jin,
S. Shima,
2020,
Japanese Journal of Applied Physics.
K. Shibata,
M. Kashiwagi,
S. Shima,
1982
.
T. Moriya,
S. Shima,
T. Maeda,
1986,
1986 Symposium on VLSI Technology. Digest of Technical Papers.
S. Shima,
H. Ito,
S. Shingubara,
1990,
Digest of Technical Papers.1990 Symposium on VLSI Technology.
A. Fukunaga,
S. Shima,
K. Maekawa,
2005
.
A. Fukunaga,
S. Shima,
Satomi Hamada,
2014,
Proceedings of International Conference on Planarization/CMP Technology 2014.
A. Fukunaga,
S. Shima,
M. Tsujimura,
2005
.