S. Shima

发表

Jin-Goo Park, Byoung-Jun Cho, S. Shima, 2014, Proceedings of International Conference on Planarization/CMP Technology 2014.

K. Suguro, Y. Nakasaki, Tomoyasu Inoue, 1988 .

J. Matsunaga, T. Nakayama, S. Shima, 1987, IEEE Transactions on Electron Devices.

E. Kondoh, Lianhua Jin, S. Shima, 2020, Japanese Journal of Applied Physics.

T. Moriya, S. Shima, T. Maeda, 1986, 1986 Symposium on VLSI Technology. Digest of Technical Papers.

S. Shima, H. Ito, S. Shingubara, 1990, Digest of Technical Papers.1990 Symposium on VLSI Technology.

A. Fukunaga, S. Shima, Satomi Hamada, 2014, Proceedings of International Conference on Planarization/CMP Technology 2014.