F. Sato

Small Silicon Condenser Microphone Improved with a Backchamber with Concave Lateral Sides

T. Takahashi, F. Sato, S. Horiike, 2007, TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.

Low‐temperature (350 °C) growth of AlGaAs/GaAs laser diode by migration enhanced epitaxy

F. Sato, M. Asai, H. Imamoto, 1988 .

A micromachined thermal flow sensor applied to a PC mouse device

S. Sugiyama, S. Sasaki, F. Sato, 2005 .

A micromachined thermal flow sensor applied to a PC mouse device

S. Sugiyama, S. Sasaki, F. Sato, 2005, IEEE Sensors, 2005..

Figure 1. Schematic diagrams of the well structure and the compositions of superlattice SQW and MQW lasers.

F. Sato, H. Imamoto, K. Imanaka, 2017 .

AlGaAs/GaAs superlattice multi-quantum-well laser diode

F. Sato, H. Imamoto, K. Imanaka, 1989 .

Migration‐enhanced epitaxy on a (111)B oriented GaAs substrate

F. Sato, H. Imamoto, K. Imanaka, 1989 .

Development of a large-force low-loss metal-contact RF MEMS switch

Koichi Imanaka, Takahiro Masuda, Yutaka Uno, 2006 .

Low thermal expansion polymide buried ridge waveguide AlGaAs/GaAs single‐quantum‐well laser diode

Koichi Imanaka, Mikihiko Shimura, Hiroshi Imamoto, 1988 .