Haixing Zou

New ring array off-axis illumination system for subhalf-micron lithography

Yu Yan, Haixing Zou, Qihua Yan, 1993, Advanced Lithography.

Study of excimer-laser direct-projective lithography

Yudong Zhang, Haixing Zou, 1993, Advanced Lithography.

Excimer laser photolithography with a 1:1 broadband catadioptric optics

Yudong Zhang, Haixing Zou, Dunwu Lu, 1991, Other Conferences.

New family of 1:1 catadioptric broadband deep-UV high-Na lithography lenses

Yudong Zhang, Haixing Zou, ZhiJiang Wang, 1991, Other Conferences.

Some problems in 1:1 broadband excimer laser lithography

Yudong Zhang, Haixing Zou, Yudong Zhang, 1992, Advanced Lithography.