A. Sugimoto

An advanced defect-monitoring test structure for electrical screening and defect localization

Y. Hamamura, H. Asakura, A. Sugimoto, 2004, IEEE Transactions on Semiconductor Manufacturing.

Current Status and Outlook of 3 D Inspection Analysis for Semiconductor Devices — Efforts Towards Smart Route-cause Analysis by New Measurement and Analysis Technology —

D. Ph., Kenji Watanabe, A. Sugimoto, 2006 .

A new defect distribution metrology with a consistent discrete exponential formula and its applications

H. Masuda, H. Sato, A. Sugimoto, 1998, IWSM. 1998 3rd International Workshop on Statistical Metrology (Cat. No.98EX113).

Killer defects control on patterned wafers for the sub quarter micron interconnect formation process

M. Ikota, Junichi Taguchi, A. Sugimoto, 1998, IWSM. 1998 3rd International Workshop on Statistical Metrology (Cat. No.98EX113).

Discrimination of clustered defects on wafers using statistical methods

H. Sato, M. Ikota, J. Taguchi, 1997, 1997 2nd International Workshop on Statistical Metrology.