Carmen Osorio

Addressing FinFET metrology challenges in 1× node using tilt-beam critical dimension scanning electron microscope

Alok Vaid, Hua Zhou, Ofer Adan, 2014 .

Hybrid metrology universal engine: co-optimization

Alok Vaid, Cornel Bozdog, Shay Wolfling, 2014, Advanced Lithography.

Impact of shrinking measurement error budgets on qualification metrology sampling and cost

Masafumi Asano, Alok Vaid, Chas Archie, 2014, Advanced Lithography.

Effect of measurement error budgets and hybrid metrology on qualification metrology sampling

Masafumi Asano, Chas Archie, Carmen Osorio, 2014 .

Hybrid metrology implementation: server approach

Alok Vaid, Cornel Bozdog, Padraig Timoney, 2015, Advanced Lithography.

Addressing FinFET metrology challenges in 1X node using tilt-beam CD-SEM

Alok Vaid, Hua Zhou, Ofer Adan, 2014, Advanced Lithography.

Hybrid metrology co-optimization of critical dimension scanning electron microscope and optical critical dimension

Alok Vaid, Cornel Bozdog, Shay Wolfling, 2014 .