Jun‐ichi Takahashi

Role of hydrogen in synchrotron‐radiation‐stimulated evaporation of amorphous SiO2 and microcrystalline Si

Tsuneo Urisu, Yuichi Utsumi, Y. Utsumi, 1992 .

Photostimulated evaporation of SiO2 films by synchrotron radiation

Tsuneo Urisu, Yuichi Utsumi, Y. Utsumi, 1990 .

Material selectivity in synchrotron radiation-stimulated etching of SiO2 and Si

Tsuneo Urisu, Yuichi Utsumi, Y. Utsumi, 1991 .

Oxygen addition effects in synchrotron radiation excited etching using SF6

Tsuneo Urisu, Yuichi Utsumi, Y. Utsumi, 1991 .