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Properties of high κ gate dielectrics Gd2O3 and Y2O3 for Si

David A. Muller, J. P. Mannaerts, Robert L. Opila, 2001 .

Properties of high k gate dielectrics Gd 2 O 3 and Y 2 O 3 for Si

D. Muller, J. Kwo, R. Opila, 2001 .