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M.G. Apte
发表
6D-2 MEMS-Enabled Miniaturized Particulate Matter Monitor Employing 1.6 GHz Aluminum Nitride Thin-Film Bulk Acoustic Wave Resonator (FBAR) and Thermophoretic Precipitator
R.M. White, M. Apte, R.M. White, 2007, 2007 IEEE Ultrasonics Symposium Proceedings.