L.A. Gundel

6D-2 MEMS-Enabled Miniaturized Particulate Matter Monitor Employing 1.6 GHz Aluminum Nitride Thin-Film Bulk Acoustic Wave Resonator (FBAR) and Thermophoretic Precipitator

R.M. White, M. Apte, R.M. White, 2007, 2007 IEEE Ultrasonics Symposium Proceedings.