Seongryong Kim

发表

Methods to Measure the Critical Dimension of the Bottoms of Through-Silicon Vias Using White-Light Scanning Interferometry

Heui-Jae Pahk, Hyun Chang-Hong, Seongryong Kim, 2014 .

Thickness and Surface Measurement of Transparent Thin-Film Layers using White Light Scanning Interferometry Combined with Reflectometry

Kwangrak Kim, Taeyong Jo, Heui-Jae Pahk, 2014 .