Rong Chen
发表
Wenjie He,
Bin Shan,
B. Shan,
2013,
2013 IEEE International Symposium on Assembly and Manufacturing (ISAM).
Self-assembled monolayer resist for atomic layer deposition of HfO2 and ZrO2 high-κ gate dielectrics
Paul C. McIntyre,
Stacey F. Bent,
S. Bent,
2004
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