K. Tada

Improvement of imprinted pattern uniformity using sapphire mold

H. Hiroshima, T. Kawasaki, M. Komuro, 2001, Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468).

Measurement of Adhesive Force Between Mold and Photocurable Resin in Imprint Technology

H. Hiroshima, T. Kawasaki, J. Taniguchi, 2001, Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468).