Masao Inoue

Control of nitrogen profile in radical nitridation of SiO2 films.

Tadahiro Ohmi, Shimpei Tsujikawa, Akinobu Teramoto, 2004 .

Control of Nitrogen Depth Profile and Chemical Bonding State in Silicon Oxynitride Films Formed by Radical Nitridation

Tadahiro Ohmi, Shimpei Tsujikawa, Akinobu Teramoto, 2005 .