B. Guo

A wafer-level poly-sige-based thin film packaging technology demonstrated on a soi-based high-Q MEM resonator

A. Witvrouw, S. Severi, J. De Coster, 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.

Thin film encapsulated SiGe accelerometer for MEMS above IC integration

A. Witvrouw, S. Severi, L. Haspeslagh, 2011, International Solid-State Sensors, Actuators and Microsystems Conference.