J. Xu
发表
Y.L. Hao,
Y. Hao,
H. Mao,
2009,
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.
C. Qian,
W.G. Wu,
W.G. Wu,
2010,
2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS).