M.W. Kowarz

Conformal grating electromechanical system (GEMS) for high-speed digital light modulation

M.W. Kowarz, J.C. Brazas, J.G. Phalen, 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).