Dale Ibbotson

Comparison between e-beam direct write and immersion lithography for 20-nm node

Pieter Brandt, Charu Sardana, Dale Ibbotson, 2015 .

Design and manufacturing enablement for three-dimensional (3D) integrated circuits (ICs)

Zhe Li, Dale Ibbotson, Hong Shi, 2012, Proceedings of the IEEE 2012 Custom Integrated Circuits Conference.

Comparison between e-beam direct write and immersion lithography for 20nm node

Pieter Brandt, Charu Sardana, Dale Ibbotson, 2015, Advanced Lithography.

Enabling the 2.5D Integration

Dale Ibbotson, Hong Shi, Yuan Li, 2012 .